11/11A, Jalan Perisa 2,
Happy Garden,
58200 Kuala Lumpur,
Malaysia.
+603-7980 3721
+603-7980 3612
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Inlet flange size | ISO250F / VG250 / ICF305 | ISO320F / VG300 / ICF356 |
Backing port size | KF40 | K40 |
Pumping speed N2 | 2650 ls-1 | 3200 ls-1 |
Pumping speed Ar | 2300 ls-1 | 2800 ls-1 |
Weight | 80 kg | 83 kg |
Compression ratio N2/H2 | >108 / 2 x 103 |
Ultimate pressure | 10-7 Pa (10-9 Torr) |
Allowable backing pressure | 266 Pa (2 Torr) |
Max gas flow N2 *(water cooled only) | 4000 sccm |
(6.76 Pam3s-1) | |
Max gas flow Ar * (water cooled only) | 2100 sccm |
(3.55 Pam3s-1) | |
Rated speed | 27700 rpm |
Starting time | <10 minutes |
Mounting position | Any orientation |
Input voltage | 200-240 V |
Max input power without TMS | 1500 VA |
Max input power with TMS | 1800 VA |