11/11A, Jalan Perisa 2,
Happy Garden,
58200 Kuala Lumpur,
Malaysia.
+603-7980 3721
+603-7980 3612
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Inlet flange size | ISO250F/VG250/ICF305 |
Backing port size | KF40 |
Pump speed N2/Ar | 2200/1900 ls-1 |
Compression ratio N2/H2 | >108 / 1 x 104 |
Ultimate pressure | 10-7 Pa (10-9 Torr) |
Allowable backing pressure | 266 Pa (2 Torr) |
Max gas flow N2 * (water cooled only) | 3000 sccm |
(5.07 Pam3s-1) | |
Max gas flow Ar * (water cooled only) | 1400 sccm |
(2.36 Pam3s-1) | |
Rated speed | 27000 rpm |
Run-up time to 90% rated speed | <8 minutes |
Mounting position | Any orientation |
Input voltage | 200-240 V |
Max input power (without TMS) | 1200 VA |
Weight | 62 kg |